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Journal: Sensors, 2009
Volume: 9
Number: 8748

Article: Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process
Authors: by Ching-Liang Dai, Po-Wei Lu, Chyan-Chyi Wu and Chienliu Chang
Link: https://www.mdpi.com/1424-8220/9/11/8748

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