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Journal: Sensors, 2008
Volume: 8
Number: 994
Article:
A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven MEMS
Authors:
by
Mohamed Boutaayamou, Ruth V. Sabariego and Patrick Dular
Link:
https://www.mdpi.com/1424-8220/8/2/994
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