Next Article in Journal
Electrochemical Interrogation of Interactions between Surface-Confined DNA and Methylene Blue
Next Article in Special Issue
Quantitative Accelerated Life Testing of MEMS Accelerometers
Previous Article in Journal
Application to Temperature Sensor Based on Green Up-conversion of Er3+ Doped Silicate Glass
Previous Article in Special Issue
Magnetostrictive Micro Mirrors for an Optical Switch Matrix
Article Menu

Export Article

Open AccessArticle
Sensors 2007, 7(11), 2660-2670;

Modeling and Manufacturing of Micromechanical RF Switch with Inductors

Department of Mechanical Engineering, National Chung Hsing University, 250 Kuo-Kuang Rd., Taichung, 402 Taiwan, R.O.C.
Author to whom correspondence should be addressed.
Received: 18 October 2007 / Accepted: 7 November 2007 / Published: 9 November 2007
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [618 KB, uploaded 21 June 2014]


This study presents the simulation, fabrication and characterization ofmicromechanical radio frequency (RF) switch with micro inductors. The inductors areemployed to enhance the characteristic of the RF switch. An equivalent circuit model isdeveloped to simulate the performance of the RF switch. The behaviors of themicromechanical RF switch are simulated by the finite element method software,CoventorWare. The micromechanical RF switch is fabricated using the complementarymetal oxide semiconductor (CMOS) and a post-process. The post-process employs a wetetching to etch the sacrificial layer, and to release the suspended structures of the RF switch.The structure of the RF switch contains a coplanar waveguide (CPW), a suspendedmembrane, eight springs and two inductors in series. Experimental results reveal that theinsertion loss and isolation of the switch are 1.7 dB at 21 GHz and 19 dB at 21 GHz,respectively. The driving voltage of the switch is about 13 V. View Full-Text
Keywords: micro switches; micro inductors; CMOS-MEMS. micro switches; micro inductors; CMOS-MEMS.
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

MDPI and ACS Style

Dai, C.-L.; Chen, Y.-L. Modeling and Manufacturing of Micromechanical RF Switch with Inductors. Sensors 2007, 7, 2660-2670.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top