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Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation
 
 

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Journal: Sensors, 2004
Volume: 4
Number: 163

Article: Fabrication of Thin-Film LAPS with Amorphous Silicon
Authors: by Tatsuo Yoshinobu, Michael J. Schöning, Friedhelm Finger, Werner Moritz and Hiroshi Iwasaki
Link: https://www.mdpi.com/1424-8220/4/10/163

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