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Journal: Sensors, 2025
Volume: 25
Number: 5370

Article: AlScN Thin Films for the Piezoelectric Transduction of Suspended Microchannel Resonators
Authors: by Yara Abdelaal, Marco Liffredo and Luis Guillermo Villanueva
Link: https://www.mdpi.com/1424-8220/25/17/5370

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