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Journal: Sensors, 2023
Volume: 23
Number: 4482

Article: Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation
Authors: by Hung-Chih Hsieh, Meng-Rong Wu and Xiang-Ting Huang
Link: https://www.mdpi.com/1424-8220/23/9/4482

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