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Journal: Sensors, 2023
Volume: 23
Number: 9099

Article: Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment
Authors: by Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine and Jean-François Christaud
Link: https://www.mdpi.com/1424-8220/23/22/9099

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