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Journal: Sensors, 2023
Volume: 23
Number: 9099
Article:
Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment
Authors:
by
Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine and Jean-François Christaud
Link:
https://www.mdpi.com/1424-8220/23/22/9099
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