Lee, S.; Park, Y.; Liu, P.; Kim, M.; Kim, H.-U.; Kim, T.
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition. Sensors 2023, 23, 8226.
https://doi.org/10.3390/s23198226
AMA Style
Lee S, Park Y, Liu P, Kim M, Kim H-U, Kim T.
Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition. Sensors. 2023; 23(19):8226.
https://doi.org/10.3390/s23198226
Chicago/Turabian Style
Lee, Seunghwan, Yonggyun Park, Pengzhan Liu, Muyoung Kim, Hyeong-U Kim, and Taesung Kim.
2023. "Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition" Sensors 23, no. 19: 8226.
https://doi.org/10.3390/s23198226
APA Style
Lee, S., Park, Y., Liu, P., Kim, M., Kim, H.-U., & Kim, T.
(2023). Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition. Sensors, 23(19), 8226.
https://doi.org/10.3390/s23198226