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Journal: SensorsVolume: 23Number: 4665
Article: Squeeze Film Effect in Surface Micromachined Nano Ultrasonic Sensor for Different Diaphragm Displacement Profiles
- Authors:
- Avik Ghosh Dastidar1,2,
- Reshmi Maity3 and
- Ramesh Chandra Tiwari2
- et al.
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