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Journal: Sensors, 2022
Volume: 22
Number: 1298

Article: Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements
Authors: by Min Xu, Ziqi Zhou, Thomas Ahbe, Erwin Peiner and Uwe Brand
Link: https://www.mdpi.com/1424-8220/22/3/1298

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