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Journal: Sensors, 2022
Volume: 22
Number: 9737
Article:
Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change
Authors:
by
Yuhong Kang, Scott Mouring, Albrey de Clerck, Shuo Mao, Wing Ng and Hang Ruan
Link:
https://www.mdpi.com/1424-8220/22/24/9737
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