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Journal: Sensors, 2022
Volume: 22
Number: 9490
Article:
Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications
Authors:
by
Kihyun Kim, Yeonsu Lee, Ignacio Llamas-Garro and Jung-Mu Kim
Link:
https://www.mdpi.com/1424-8220/22/23/9490
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