Order Article Reprints

Cohen A, Cohen H, Cohen SR, Khodorov S, Feldman Y, Kossoy A, Kaplan-Ashiri I, Frenkel A, Wachtel E, Lubomirsky I, et al. C-Axis Textured, 2–3 μm Thick Al_0.75Sc_0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications. Sensors. 2022; 22(18):7041. https://doi.org/10.3390/s22187041

Cohen, Asaf, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky, and et al. 2022. "C-Axis Textured, 2–3 μm Thick Al_0.75Sc_0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications" Sensors 22, no. 18: 7041. https://doi.org/10.3390/s22187041

Cohen, A., Cohen, H., Cohen, S. R., Khodorov, S., Feldman, Y., Kossoy, A., Kaplan-Ashiri, I., Frenkel, A., Wachtel, E., Lubomirsky, I., & Ehre, D. (2022). C-Axis Textured, 2–3 μm Thick Al_0.75Sc_0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications. Sensors, 22(18), 7041. https://doi.org/10.3390/s22187041