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Journal: Sensors, 2022
Volume: 22
Number: 7041
7041
Article: C-Axis Textured, 2–3 μm Thick Al_0.75Sc_0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications
Authors: by Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky and David Ehre
Link: https://www.mdpi.com/1424-8220/22/18/7041

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