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Communication

Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements

by 1,2, 1,2, 1,2, 1,2, 1,2,*, 1,2 and 1,2
1
State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
2
Beijing Lab of Precision/Ultra-Precision Manufacture Equipment and Control, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Academic Editor: Alexandr Volyar
Sensors 2022, 22(10), 3738; https://doi.org/10.3390/s22103738
Received: 14 April 2022 / Revised: 7 May 2022 / Accepted: 12 May 2022 / Published: 14 May 2022
Grating interferometers that use large two-dimensional grating splice modules for performing wide-range measurements have significant advantages for identifying the position of the wafer stage. However, the manufacturing process of large two-dimensional grating splice modules is very difficult. In contrast to existing redundant designs in the grating line dimension, we propose a novel interferometric reading head with a redundant design for obtaining wide-range displacement measurements. This interferometric reading head uses a one-dimensional grating splice module, and it was observed to be compatible with two orthogonal gratings. We designed a grating interferometer system composed of four reading heads to achieve a wide range of measurements and verified it using ZEMAX simulation. By conducting experiments, we were able to verify the compatibility of the reading head with gratings possessing different grating line directions; the measurement noise was found to be less than 0.3 nm. View Full-Text
Keywords: grating interferometer; wide-range; displacement measurement; six degree-of-freedom grating interferometer; wide-range; displacement measurement; six degree-of-freedom
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MDPI and ACS Style

Ye, W.; Cheng, R.; Zhang, M.; Zhu, Y.; Wang, L.; Hu, J.; Li, X. Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements. Sensors 2022, 22, 3738. https://doi.org/10.3390/s22103738

AMA Style

Ye W, Cheng R, Zhang M, Zhu Y, Wang L, Hu J, Li X. Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements. Sensors. 2022; 22(10):3738. https://doi.org/10.3390/s22103738

Chicago/Turabian Style

Ye, Weinan, Rong Cheng, Ming Zhang, Yu Zhu, Leijie Wang, Jinchun Hu, and Xin Li. 2022. "Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements" Sensors 22, no. 10: 3738. https://doi.org/10.3390/s22103738

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