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Article

Ultra-Narrow SPP Generation from Ag Grating

1
Infineon Technologies Austria AG, 9500 Villach, Austria
2
Silicon Austria Labs GmbH, 9524 Villach, Austria
3
Institute of Microelectronics and Micro Sensoric, Johannes Kepler University Linz, 4040 Linz, Austria
*
Author to whom correspondence should be addressed.
This paper is an extended version of our paper published in Stocker, G.; Spettel, J.; Dao, T.D.; Tortschanoff, A.; Jannesari, R.; Pühringer, G.; Saeidi, P.; Dubois, F.; Fleury, C.; Consani, C.; et al. Plasmonic Silver Grating for Mid-Infrared Sensing. In Proceedings of the 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Orlando, FL, USA, 20–24 June 2021; pp. 1072–1075.
These authors contributed equally to this work.
Academic Editors: Atsushi Motogaito and Elba Mauriz
Sensors 2021, 21(21), 6993; https://doi.org/10.3390/s21216993
Received: 11 September 2021 / Revised: 15 October 2021 / Accepted: 18 October 2021 / Published: 21 October 2021
(This article belongs to the Special Issue Surface Plasmon Sensors)
In this study, we investigate the potential of one-dimensional plasmonic grating structures to serve as a platform for, e.g., sensitive refractive index sensing. This is achieved by comparing numerical simulations to experimental results with respect to the excitation of surface plasmon polaritons (SPPs) in the mid-infrared region. The samples, silver-coated poly-silicon gratings, cover different grating depths in the range of 50 nm–375 nm. This variation of the depth, at a fixed grating geometry, allows the active tuning of the bandwidth of the SPP resonance according to the requirements of particular applications. The experimental setup employs a tunable quantum cascade laser (QCL) and allows the retrieval of angle-resolved experimental wavelength spectra to characterize the wavelength and angle dependence of the SPP resonance of the specular reflectance. The experimental results are in good agreement with the simulations. As a tendency, shallower gratings reveal narrower SPP resonances in reflection. In particular, we report on 2.9 nm full width at half maximum (FWHM) at a wavelength of 4.12 µm and a signal attenuation of 21%. According to a numerical investigation with respect to a change of the refractive index of the dielectric above the grating structure, a spectral shift of 4122nmRIU can be expected, which translates to a figure of merit (FOM) of about 1421 RIU1. The fabrication of the suggested structures is performed on eight-inch silicon substrates, entirely accomplished within an industrial fabrication environment using standard microfabrication processes. This in turn represents a decisive step towards plasmonic sensor technologies suitable for semiconductor mass-production. View Full-Text
Keywords: surface plasmon polaritons; refractive index sensing; reflection measurement; plasmonic grating surface plasmon polaritons; refractive index sensing; reflection measurement; plasmonic grating
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MDPI and ACS Style

Stocker, G.; Spettel, J.; Dao, T.D.; Tortschanoff, A.; Jannesari, R.; Pühringer, G.; Saeidi, P.; Dubois, F.; Fleury, C.; Consani, C.; Grille, T.; Aschauer, E.; Jakoby, B. Ultra-Narrow SPP Generation from Ag Grating. Sensors 2021, 21, 6993. https://doi.org/10.3390/s21216993

AMA Style

Stocker G, Spettel J, Dao TD, Tortschanoff A, Jannesari R, Pühringer G, Saeidi P, Dubois F, Fleury C, Consani C, Grille T, Aschauer E, Jakoby B. Ultra-Narrow SPP Generation from Ag Grating. Sensors. 2021; 21(21):6993. https://doi.org/10.3390/s21216993

Chicago/Turabian Style

Stocker, Gerald, Jasmin Spettel, Thang D. Dao, Andreas Tortschanoff, Reyhaneh Jannesari, Gerald Pühringer, Parviz Saeidi, Florian Dubois, Clement Fleury, Cristina Consani, Thomas Grille, Elmar Aschauer, and Bernhard Jakoby. 2021. "Ultra-Narrow SPP Generation from Ag Grating" Sensors 21, no. 21: 6993. https://doi.org/10.3390/s21216993

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