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Journal: Sensors, 2021
Volume: 21
Number: 5775

Article: Development of the Heterodyne Laser Encoder System for the X–Y Positioning Stage
Authors: by Chung-Ping Chang, Tsung-Chun Tu, Siang-Ruei Huang, Yung-Cheng Wang and Syuan-Cheng Chang
Link: https://www.mdpi.com/1424-8220/21/17/5775

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