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Journal: Sensors, 2020
Volume: 20
Number: 2306

Article: An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process
Authors: by Qianhuang Chen, Tianyang Shao and Yan Xing
Link: https://www.mdpi.com/1424-8220/20/8/2306

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