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Journal: Sensors, 2020
Volume: 20
Number: 1001
Article:
Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory
Authors:
by
Maximilian Krey, Bernd Hähnlein, Katja Tonisch, Stefan Krischok and Hannes Töpfer
Link:
https://www.mdpi.com/1424-8220/20/4/1001
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