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Schöning MJ, Simonis A, Ruge C, Ecken H, Müller-Veggian M, Lüth H. A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer. Sensors. 2002; 2(1):11-22. https://doi.org/10.3390/s20100011

Schöning, Michael J., Anette Simonis, Christian Ruge, Holger Ecken, Mattea Müller-Veggian, and Hans Lüth. 2002. "A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer" Sensors 2, no. 1: 11-22. https://doi.org/10.3390/s20100011

Schöning, M. J., Simonis, A., Ruge, C., Ecken, H., Müller-Veggian, M., & Lüth, H. (2002). A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer. Sensors, 2(1), 11-22. https://doi.org/10.3390/s20100011