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Journal: SensorsVolume: 2Number: 11
Article: A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer
  • Authors:
  • Michael J. Schöning1,2,*,
  • Anette Simonis1,2 and
  • Christian Ruge2
  • et al.
Link: https://www.mdpi.com/1424-8220/2/1/11

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