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Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect

1
Argonne National Laboratory, 9700 S-Cass Avenue, Argonne, IL 60439, USA
2
Department of Mechanical Engineering, University of Wisconsin-Milwaukee, 3200 N Cramer Street, Milwaukee, WI 53211, USA
*
Authors to whom correspondence should be addressed.
Present address: IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, USA
Sensors 2019, 19(9), 2061; https://doi.org/10.3390/s19092061
Received: 8 March 2019 / Revised: 18 April 2019 / Accepted: 24 April 2019 / Published: 2 May 2019
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Abstract

This article reports that it is possible to make multifunctional sensing devices with ZnO infiltrated polymers while the sensing interactions could occur throughout the polymer. As such, we find that infiltrated devices with SU-8 polymer can result in highly sensitive UV sensors. Mesh dielectric core devices were found to make sensitive gas sensors with a better than 5 ppm sensitivity for formaldehyde and NO2. A new type of p-n junction device is further demonstrated that is sensitive to UV illumination, thus making it an enhanced UV sensor. Sensing devices relying on volume interactions, such as light absorption, can significantly benefit from the infiltrated polymer. In contrast, devices that rely on surface interactions, such as gas sensors, do not gain performance in any significant way with or without the infiltrated polymer. View Full-Text
Keywords: gas sensor; polymer infiltration; UV sensor; atomic layer deposition gas sensor; polymer infiltration; UV sensor; atomic layer deposition
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Ocola, L.E.; Wang, Y.; Divan, R.; Chen, J. Multifunctional UV and Gas Sensors Based on Vertically Nanostructured Zinc Oxide: Volume Versus Surface Effect. Sensors 2019, 19, 2061.

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