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Journal: Sensors, 2019
Volume: 19
Number: 1348
Article:
Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator
Authors:
by
Jingjing Feng, Cheng Liu, Wei Zhang, Jianxin Han and Shuying Hao
Link:
https://www.mdpi.com/1424-8220/19/6/1348
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