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Open AccessArticle

A Gas Sensing Channel Composited with Pristine and Oxygen Plasma-Treated Graphene

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School of Microelectronics, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China
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Science and Technology on Analog Integrated Circuit Laboratory, Chongqing 401332, China
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Guangdong Shunde Xi’an Jiaotong University Academy, NO.3 Deshengdong Road, Daliang, Shunde District, Foshan 528300, China
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School of Science, Xi’an Jiaotong University, Xi’an 710049, China
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Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, School of Electronic and Information Engineering, Xi’an Jiaotong University, 28 West Xianning Road, Xi’an 710049, China
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Research institute of Xi’an Jiaotong University (Zhejiang), Hangzhou, Zhejiang 311215, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(3), 625; https://doi.org/10.3390/s19030625
Received: 14 December 2018 / Revised: 27 January 2019 / Accepted: 28 January 2019 / Published: 1 February 2019
(This article belongs to the Special Issue Recent Advances in Gas Nanosensors)
Oxygen plasma treatment has been reported as an effective way of improving the response of graphene gas sensors. In this work, a gas sensor based on a composite graphene channel with a layer of pristine graphene (G) at the bottom and an oxygen plasma-treated graphene (OP-G) as a covering layer was reported. The OP-G on top provided oxygen functional groups and serves as the gas molecule grippers, while the as-grown graphene beneath serves as a fast carrier transport path. Thus, the composite channel (OP-G/G) demonstrated significantly improved response in NH3 gas sensing tests compared with the pristine G channel. Moreover, the OP-G/G channel showed faster response and recovering process than the OP-G channel. Since this kind of composite channel is fabricated from chemical vapor deposited graphene and patterned with standard photolithography, the device dimension was much smaller than a gas sensor fabricated from reduced graphene oxide and it is favorable for the integration of a large number of sensing units. View Full-Text
Keywords: graphene; oxygen plasma treatment; gas sensor; NH3 graphene; oxygen plasma treatment; gas sensor; NH3
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MDPI and ACS Style

Wu, H.; Bu, X.; Deng, M.; Chen, G.; Zhang, G.; Li, X.; Wang, X.; Liu, W. A Gas Sensing Channel Composited with Pristine and Oxygen Plasma-Treated Graphene. Sensors 2019, 19, 625.

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