Magnetic Sensing Properties of PVD Carbon Films Containing Vertically Aligned Crystallites
Abstract
:1. Introduction
2. Materials and Methods
2.1. Film Deposition and Test Sample Preparation
2.2. Film Characterization and Electric Measurement
3. Results and Discussion
3.1. Characterization of the Nano-Crystallited Carbon Film
3.2. Magnetic Sensing Performances in Magnetic Field with Different Intensities
3.3. Magnetic Sensing Performances in Magnetic Field with Different Angles
3.4. The Enhancement of MR Performance by n-Si Substrate
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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0 T | 9 T | MR | |
---|---|---|---|
C-film/n-Si device Rd | 380.09 | 684.92 | 80.1% |
n-Si substrate Rsi | 683.15 | 689.83 | 1% |
C-film (calculated) Rc | 856.79 | 92630 | 10711.28% |
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Dai, X.; Guo, J.; Huang, T.; Ding, D.; Wang, C. Magnetic Sensing Properties of PVD Carbon Films Containing Vertically Aligned Crystallites. Sensors 2019, 19, 4248. https://doi.org/10.3390/s19194248
Dai X, Guo J, Huang T, Ding D, Wang C. Magnetic Sensing Properties of PVD Carbon Films Containing Vertically Aligned Crystallites. Sensors. 2019; 19(19):4248. https://doi.org/10.3390/s19194248
Chicago/Turabian StyleDai, Xingze, Jing Guo, Tongbin Huang, Dong Ding, and Chao Wang. 2019. "Magnetic Sensing Properties of PVD Carbon Films Containing Vertically Aligned Crystallites" Sensors 19, no. 19: 4248. https://doi.org/10.3390/s19194248