Next Article in Journal
Validation of Finite Element Model by Smart Aggregate-Based Stress Monitoring
Next Article in Special Issue
Field Evaluation of a Portable Whispering Gallery Mode Accelerometer
Previous Article in Journal
Evaluation of Object Surface Edge Profiles Detected with a 2-D Laser Scanning Sensor
Previous Article in Special Issue
THz Sensing With Anomalous Extraordinary Optical Transmission Hole Arrays
Article Menu
Issue 11 (November) cover image

Export Article

Open AccessArticle
Sensors 2018, 18(11), 4061;

A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide

Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada
Author to whom correspondence should be addressed.
Received: 28 September 2018 / Revised: 31 October 2018 / Accepted: 9 November 2018 / Published: 21 November 2018
(This article belongs to the Special Issue Resonator Sensors 2018)
PDF [3820 KB, uploaded 21 November 2018]


We report on thermal and evanescent field sensing from a tellurium oxide optical microcavity resonator on a silicon photonics platform. The on-chip resonator structure is fabricated using silicon-photonics-compatible processing steps and consists of a silicon-on-insulator waveguide next to a circular trench that is coated in a tellurium oxide film. We characterize the device’s sensitivity by both changing the temperature and coating water over the chip and measuring the corresponding shift in the cavity resonance wavelength for different tellurium oxide film thicknesses. We obtain a thermal sensitivity of up to 47 pm/°C and a limit of detection of 2.2 × 10−3 RIU for a device with an evanescent field sensitivity of 10.6 nm/RIU. These results demonstrate a promising approach to integrating tellurium oxide and other novel microcavity materials into silicon microphotonic circuits for new sensing applications. View Full-Text
Keywords: photonic sensors; optical microcavities; resonators; silicon photonics photonic sensors; optical microcavities; resonators; silicon photonics

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Frankis, H.C.; Su, D.; Bonneville, D.B.; Bradley, J.D.B. A Tellurium Oxide Microcavity Resonator Sensor Integrated On-Chip with a Silicon Waveguide. Sensors 2018, 18, 4061.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top