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Sensors 2017, 17(8), 1800; https://doi.org/10.3390/s17081800

A Multiscale Material Testing System for In Situ Optical and Electron Microscopes and Its Application

1,2,3
,
4
,
5
and
1,3,*
1
Department of Engineering Mechanics, Applied Mechanics Lab., Tsinghua University, Beijing 100084, China
2
Aero Engine Academy of China, Beijing 101304, China
3
Center for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China
4
Suzhou Delve Test Precise-Instrument Co., Ltd., Suzhou 215000, China
5
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Received: 6 June 2017 / Revised: 21 July 2017 / Accepted: 2 August 2017 / Published: 4 August 2017
(This article belongs to the Special Issue Piezoelectric Micro- and Nano-Devices)
Full-Text   |   PDF [16358 KB, uploaded 5 August 2017]   |  

Abstract

We report a novel material testing system (MTS) that uses hierarchical designs for in-situ mechanical characterization of multiscale materials. This MTS is adaptable for use in optical microscopes (OMs) and scanning electron microscopes (SEMs). The system consists of a microscale material testing module (m-MTM) and a nanoscale material testing module (n-MTM). The MTS can measure mechanical properties of materials with characteristic lengths ranging from millimeters to tens of nanometers, while load capacity can vary from several hundred micronewtons to several nanonewtons. The m-MTM is integrated using piezoelectric motors and piezoelectric stacks/tubes to form coarse and fine testing modules, with specimen length from millimeters to several micrometers, and displacement distances of 12 mm with 0.2 µm resolution for coarse level and 8 µm with 1 nm resolution for fine level. The n-MTM is fabricated using microelectromechanical system technology to form active and passive components and realizes material testing for specimen lengths ranging from several hundred micrometers to tens of nanometers. The system’s capabilities are demonstrated by in-situ OM and SEM testing of the system’s performance and mechanical properties measurements of carbon fibers and metallic microwires. In-situ multiscale deformation tests of Bacillus subtilis filaments are also presented. View Full-Text
Keywords: multiscale; material testing system and force sensor; mechanical property; Bacillus subtilis filament multiscale; material testing system and force sensor; mechanical property; Bacillus subtilis filament
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Ye, X.; Cui, Z.; Fang, H.; Li, X. A Multiscale Material Testing System for In Situ Optical and Electron Microscopes and Its Application. Sensors 2017, 17, 1800.

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