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Sensors 2017, 17(6), 1215;

Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror

College of Automation Science and Engineering, South China University of Technology, Guangzhou 510000, China
Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 3 April 2017 / Revised: 22 May 2017 / Accepted: 23 May 2017 / Published: 26 May 2017
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [2273 KB, uploaded 26 May 2017]   |  


The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regulation problem theoretically. In this paper, based on the internal model principle, the output regulation problem is solved by designing a robust controller that is able to force the micromirror to track the command signal accurately. The proposed controller relies little on the accuracy of the model. Further, the proposed controller is implemented, and its effectiveness is examined by experiments. The experimental results demonstrate that the performance of the proposed controller is satisfying. View Full-Text
Keywords: internal model; robust tracking; output regulation problem; micromirror internal model; robust tracking; output regulation problem; micromirror

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Tan, J.; Sun, W.; Yeow, J.T.W. Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror. Sensors 2017, 17, 1215.

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