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Sensors 2017, 17(3), 462;

Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry

Dipartimento di Ingegneria Industriale e dell’Informazione, Università degli Studi di Pavia, 27100 Pavia, Italy
STMicroelectronics, 20864 Agrate Brianza (MB), Italy
STMicroelectronics, 20010 Cornaredo (Mi), Italy
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 13 January 2017 / Revised: 20 February 2017 / Accepted: 20 February 2017 / Published: 25 February 2017
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time. View Full-Text
Keywords: optical low-coherence reflectometry; optical measurements; thin-film piezo-electric actuator; non-destructive testing optical low-coherence reflectometry; optical measurements; thin-film piezo-electric actuator; non-destructive testing

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Merlo, S.; Poma, P.; Crisà, E.; Faralli, D.; Soldo, M. Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry. Sensors 2017, 17, 462.

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