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Open AccessArticle

Application of Thin ZnO ALD Layers in Fiber-Optic Fabry-Pérot Sensing Interferometers

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Narutowicza Street 11/12, Gdańsk 80-233, Poland
Institut Européen des Membranes, UMR-5635, Université de Montpellier, The École Nationale Supérieure de Chimie de Montpellier, Centre national de la recherche scientifique, Place Eugène Bataillon, Montpellier 34095, France
Institute of Atomic Physics and Spectroscopy, University of Latvia, 19 Raina Blvd., Riga LV-1586, Latvia
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Academic Editors: Vincenzo Spagnolo and Dragan Indjin
Sensors 2016, 16(3), 416;
Received: 10 February 2016 / Revised: 17 March 2016 / Accepted: 18 March 2016 / Published: 22 March 2016
(This article belongs to the Special Issue Infrared and THz Sensing and Imaging)
In this paper we investigated the response of a fiber-optic Fabry-Pérot sensing interferometer with thin ZnO layers deposited on the end faces of the optical fibers forming the cavity. Standard telecommunication single-mode optical fiber (SMF-28) segments were used with the thin ZnO layers deposited by Atomic Layer Deposition (ALD). Measurements were performed with the interferometer illuminated by two broadband sources operating at 1300 nm and 1550 nm. Reflected interference signal was acquired by an optical spectrum analyzer while the length of the air cavity was varied. Thickness of the ZnO layers used in the experiments was 50 nm, 100 nm, and 200 nm. Uncoated SMF-28 fiber was also used as a reference. Based on the results of measurements, the thickness of the ZnO layers and the length of the cavity were selected in order to achieve good visibility. Following, the interferometer was used to determine the refractive index of selected liquids. View Full-Text
Keywords: Fabry-Pérot interferometer; Atomic Layer Deposition; ZnO layer; interference Fabry-Pérot interferometer; Atomic Layer Deposition; ZnO layer; interference
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MDPI and ACS Style

Majchrowicz, D.; Hirsch, M.; Wierzba, P.; Bechelany, M.; Viter, R.; Jędrzejewska‑Szczerska, M. Application of Thin ZnO ALD Layers in Fiber-Optic Fabry-Pérot Sensing Interferometers. Sensors 2016, 16, 416.

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