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Sensors 2015, 15(7), 16248-16264;

A Meliorated Multi-Frequency Band Pyroelectric Sensor

Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan
Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Keelung Rd., Sec. 4, Taipei 10607, Taiwan
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 5 June 2015 / Revised: 1 July 2015 / Accepted: 2 July 2015 / Published: 6 July 2015
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [6265 KB, uploaded 6 July 2015]   |  


This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band. View Full-Text
Keywords: pyroelectric sensor; multi-frequency; zinc oxide; aerosol deposition pyroelectric sensor; multi-frequency; zinc oxide; aerosol deposition

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Hsiao, C.-C.; Liu, S.-Y.; Siao, A.-S. A Meliorated Multi-Frequency Band Pyroelectric Sensor. Sensors 2015, 15, 16248-16264.

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