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Open AccessArticle

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

by Zhe Wang 1,2,†, Qing-Tang Xue 1,2,†, Yuan-Quan Chen 1,2, Yi Shu 1,2, He Tian 1,2, Yi Yang 1,2, Dan Xie 1,2, Jian-Wen Luo 3 and Tian-Ling Ren 1,2,*
1
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2
Tsinghua National Laboratory for Information Science and Technology (TNList), Beijing 100084, China
3
Department of Biomedical Engineering, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Sensors 2015, 15(2), 2538-2547; https://doi.org/10.3390/s150202538
Received: 30 October 2014 / Accepted: 22 December 2014 / Published: 23 January 2015
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications. View Full-Text
Keywords: ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT
MDPI and ACS Style

Wang, Z.; Xue, Q.-T.; Chen, Y.-Q.; Shu, Y.; Tian, H.; Yang, Y.; Xie, D.; Luo, J.-W.; Ren, T.-L. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT. Sensors 2015, 15, 2538-2547.

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