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Open AccessArticle

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

by Zhe Wang 1,2,†, Qing-Tang Xue 1,2,†, Yuan-Quan Chen 1,2, Yi Shu 1,2, He Tian 1,2, Yi Yang 1,2, Dan Xie 1,2, Jian-Wen Luo 3 and Tian-Ling Ren 1,2,*
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
Tsinghua National Laboratory for Information Science and Technology (TNList), Beijing 100084, China
Department of Biomedical Engineering, Tsinghua University, Beijing 100084, China
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Sensors 2015, 15(2), 2538-2547;
Received: 30 October 2014 / Accepted: 22 December 2014 / Published: 23 January 2015
This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications. View Full-Text
Keywords: ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT ultrasonic; flexible ultrasound transducer; ultrasound imaging; flexible device; PZT
MDPI and ACS Style

Wang, Z.; Xue, Q.-T.; Chen, Y.-Q.; Shu, Y.; Tian, H.; Yang, Y.; Xie, D.; Luo, J.-W.; Ren, T.-L. A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT. Sensors 2015, 15, 2538-2547.

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