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Sensors 2015, 15(1), 672-686;

Performance Comparison of Cross-Like Hall Plates with Different Covering Layers

School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China
GLOBALFOUNDRIES Singapore, Singapore 738406, Singapore
Nanjing Foreign Language School, Nanjing 210008, China
Author to whom correspondence should be addressed.
Received: 7 November 2014 / Accepted: 24 December 2014 / Published: 31 December 2014
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [4794 KB, uploaded 31 December 2014]


This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account. View Full-Text
Keywords: cross-like Hall plate; sensitivity; offset; P-type covering layer cross-like Hall plate; sensitivity; offset; P-type covering layer
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Lyu, F.; Zhang, Z.; Toh, E.-H.; Liu, X.; Ding, Y.; Pan, Y.; Li, C.; Li, L.; Sha, J.; Pan, H. Performance Comparison of Cross-Like Hall Plates with Different Covering Layers. Sensors 2015, 15, 672-686.

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