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Open AccessArticle

A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities

Departamento de Electricidad y Electrónica, Universidad del País Vasco UPV/EHU Bº Sarriena s/n Leioa 48940, Spain
BCMaterials, Universidad del País Vasco UPV/EHU, Bº Sarriena s/n Leioa 48940, Spain
Elytt Energy, Paseo de la Castellana 114, 3º, 728046 Madrid, Spain
Author to whom correspondence should be addressed.
Sensors 2014, 14(6), 9615-9627;
Received: 16 January 2014 / Revised: 9 May 2014 / Accepted: 27 May 2014 / Published: 30 May 2014
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Spain 2013)
In many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimentally demonstrated using a first laboratory prototype. The principle of operation of the new transducer is summarized and tested. Furthermore, an electronic interface that can be used together with the displacement transducer is designed and proved. It has been experimentally demonstrated that very high and linear sensitivity characteristic curves, in the range of some kHz/nm; are easily obtainable using this kind of transducer when it is combined with a laboratory network analyzer. In order to replace a network analyzer and provide a more affordable, self-contained, compact solution, an electronic interface has been designed, preserving as much as possible the excellent performance of the transducer, and turning it into a true standalone positioning sensor. The results obtained using the transducer together with a first prototype of the electronic interface built with cheap discrete elements show that positioning accuracies in the micrometer range are obtainable using this cost-effective solution. Better accuracies would also be attainable but using more involved and costly electronics interfaces. View Full-Text
Keywords: positioning sensors; resonant cavities; precision metrology positioning sensors; resonant cavities; precision metrology
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Asua, E.; Etxebarria, V.; García-Arribas, A.; Feutchwanger, J.; Portilla, J.; Lucas, J. A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities. Sensors 2014, 14, 9615-9627.

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