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Sensors 2014, 14(2), 3323-3341;

A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

1,2,3,* , 1,2,3
College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Key Laboratory for Optoelectronic Technology & Systems, Ministry of Education of China, Chongqing 400044, China
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing 400044, China
Author to whom correspondence should be addressed.
Received: 25 December 2013 / Revised: 21 January 2014 / Accepted: 21 January 2014 / Published: 19 February 2014
(This article belongs to the Section Sensor Networks)
Full-Text   |   PDF [795 KB, uploaded 21 June 2014]


This paper presents a micro-electro-mechanical system (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage. Based on simulation results, a MEMS Pb(Zr,Ti)O3 (PZT) cantilever array with an integrated large Si proof mass is designed and fabricated to improve output voltage and power. Test results show that the fabricated generator, with five cantilever beams (with unit dimensions of about 3 × 2.4 × 0.05 mm3) and an individual integrated Si mass dimension of about 8 × 12.4 × 0.5 mm3, produces a output power of 66.75 μW, or a power density of 5.19 μWmm−3g−2 with an optimal resistive load of 220 kΩ from 5 m/s2 vibration acceleration at its resonant frequency of 234.5 Hz. In view of high internal impedance characteristic of the PZT generator, an efficient autonomous power conditioning circuit, with the function of impedance matching, energy storage and voltage regulation, is then presented, finding that the efficiency of the energy storage is greatly improved and up to 64.95%. The proposed self-supplied energy generator with power conditioning circuit could provide a very promising complete power supply solution for wireless sensor node loads. View Full-Text
Keywords: energy harvester; PZT; MEMS; power conditioning circuit energy harvester; PZT; MEMS; power conditioning circuit
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Yu, H.; Zhou, J.; Deng, L.; Wen, Z. A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit. Sensors 2014, 14, 3323-3341.

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