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Sensors 2014, 14(2), 3065-3076;

A Wireless and Passive Low-Pressure Sensor

Carinthian Tech Research (CTR AG), Villach/St. Magdalen 9524, Austria
Author to whom correspondence should be addressed.
Received: 16 January 2014 / Revised: 27 January 2014 / Accepted: 7 February 2014 / Published: 17 February 2014
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [509 KB, uploaded 21 June 2014]


This paper will discuss the results obtained with a first prototype of a completely passive and wireless low pressure sensor. The device is a heat conductivity gauge, based on a wireless and passive SAW temperature sensor. The required heating energy is applied to the sensor using inductive coupling. The prototype was successfully tested in a vacuum chamber. Its equilibrium temperature changed drastically and in a reproducible way when pressure steps were applied. However, the response time was very long. A model is provided to account for the sensor’s behavior. It is then used to show that the response time could be strongly improved using basic design improvements. Further possible improvements are discussed. View Full-Text
Keywords: low pressure sensor; Pirani; wireless; passive; SAW; inductive heating low pressure sensor; Pirani; wireless; passive; SAW; inductive heating
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Nicolay, P.; Lenzhofer, M. A Wireless and Passive Low-Pressure Sensor. Sensors 2014, 14, 3065-3076.

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