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Sensors 2014, 14(11), 22099-22112;

Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range

Department of Mechanical Engineering, National Chung Hsing University, 250, Taichung 402, Taiwan
Instrument Technology Research Center, National Applied Research Laboratories, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu 300, Taiwan
Author to whom correspondence should be addressed.
Received: 23 April 2014 / Revised: 11 November 2014 / Accepted: 13 November 2014 / Published: 21 November 2014
(This article belongs to the Special Issue Sensors for Fluid Leak Detection)
Full-Text   |   PDF [990 KB, uploaded 21 November 2014]


In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element. The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate. A pair of electrodes is set near each end. An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair. Because the viscous forces on the piezoelectric beam vary at different air pressures, the vibration of the beam depends on the vacuum pressure. The developed pressure sensor can sense a wide range of pressure, from 6.5 × 10−6 to 760 Torr. The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage. View Full-Text
Keywords: vacuum pressure sensor; viscous forces; piezoelectric beam vacuum pressure sensor; viscous forces; piezoelectric beam
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Wang, B.-Y.; Hsieh, F.-C.; Lin, C.-Y.; Chen, S.-E.; Chen, F.-Z.; Wu, C.-C. Development of a Piezoelectric Vacuum Sensing Component for a Wide Pressure Range. Sensors 2014, 14, 22099-22112.

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