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Journal: Sensors, 2014
Volume: 14
Number: 877

Article: Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy
Authors: by Josef Lazar, Petr Klapetek, Miroslav Valtr, Jan Hrabina, Zdenek Buchta, Onrej Cip, Martin Cizek, Jindrich Oulehla and Mojmir Sery
Link: https://www.mdpi.com/1424-8220/14/1/877

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