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Sensors 2013, 13(3), 3615-3624;

A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring

Low Dimensional Materials Research Centre, Department of Physics, University of Malaya, Kuala Lumpur 50603, Malaysia
Department of Electrical Engineering, College of Engineering, Qassim University, P.O. Box 6688 Qassim 51452, Saudi Arabia
Ghulam Ishaq Khan Institute of Engineering Sciences and Technology, Topi 23640, Pakistan
Author to whom correspondence should be addressed.
Received: 20 January 2013 / Revised: 10 March 2013 / Accepted: 10 March 2013 / Published: 14 March 2013
(This article belongs to the Section Chemical Sensors)
PDF [964 KB, uploaded 21 June 2014]


In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ~200 nm) were primarily deposited on plasma cleaned glass substrates by the physical vapor deposition (PVD) technique. A pair of rectangular silver electrodes was formed by patterning silver film through standard optical lithography technique. An active layer of organic-inorganic composite for humidity sensing was later spun coated to cover the separation between the silver electrodes. The electrical characterization of the sensor was performed as a function of relative humidity levels and frequency of the AC input signal. The sensor showed reversible changes in its capacitance with variations in humidity level. The maximum sensitivity ~31.6 pF/%RH at 100 Hz in capacitive mode of operation has been attained. The aim of this study was to increase the sensitivity of the previously reported humidity sensors using PEPC and NiPc, which has been successfully achieved. View Full-Text
Keywords: composite film; humidity sensor; physical vapor deposition; scanning electron micrograph composite film; humidity sensor; physical vapor deposition; scanning electron micrograph
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ahmad, Z.; Zafar, Q.; Sulaiman, K.; Akram, R.; Karimov, K.S. A Humidity Sensing Organic-Inorganic Composite for Environmental Monitoring. Sensors 2013, 13, 3615-3624.

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