Next Article in Journal
Network Adaptive Deadband: NCS Data Flow Control for Shared Networks
Next Article in Special Issue
Development of a Biosensor for Environmental Monitoring Based on Microalgae Immobilized in Silica Hydrogels
Previous Article in Journal
Signal Transmission in a Human Body Medium-Based Body Sensor Network Using a Mach-Zehnder Electro-Optical Sensor
Previous Article in Special Issue
Identification of Cell-Surface Molecular Interactions under Living Conditions by Using the Enzyme-Mediated Activation of Radical Sources (EMARS) Method
Open AccessArticle

Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology

Laboratory of Nanobiotechnology, National Institute for Research and Development in Microtechnologies (IMT-Bucharest), 126A, Erou Iancu Nicolae Street, 077190 Bucharest, Romania
Department of Biophysics and Physiology, Faculty of Biology, University of Bucharest, Splaiul Independentei 91-95, 005095 Bucharest, Romania
Author to whom correspondence should be addressed.
Sensors 2012, 12(12), 16571-16590;
Received: 17 September 2012 / Revised: 8 November 2012 / Accepted: 9 November 2012 / Published: 3 December 2012
(This article belongs to the Special Issue Live Cell-Based Sensors)
Recent progress in patterned microelectrode manufacturing technology and microfluidics has opened the way to a large variety of cellular and molecular biosensor-based applications. In this extremely diverse and rapidly expanding landscape, silicon-based technologies occupy a special position, given their statute of mature, consolidated, and highly accessible areas of development. Within the present work we report microfabrication procedures and workflows for 3D patterned gold-plated microelectrode arrays (MEA) of different shapes (pyramidal, conical and high aspect ratio), and we provide a detailed characterization of their physical features during all the fabrication steps to have in the end a reliable technology. Moreover, the electrical performances of MEA silicon chips mounted on standardized connector boards via ultrasound wire-bonding have been tested using non-destructive electrochemical methods: linear sweep and cyclic voltammetry, impedance spectroscopy. Further, an experimental recording chamber package suitable for in vitro electrophysiology experiments has been realized using custom-design electronics for electrical stimulus delivery and local field potential recording, included in a complete electrophysiology setup, and the experimental structures have been tested on newborn rat hippocampal slices, yielding similar performance compared to commercially available MEA equipments. View Full-Text
Keywords: 3D electrodes; MEA; fabrication; electrochemical characterization; neuro-electrophysiology tests 3D electrodes; MEA; fabrication; electrochemical characterization; neuro-electrophysiology tests
MDPI and ACS Style

Kusko, M.; Craciunoiu, F.; Amuzescu, B.; Halitzchi, F.; Selescu, T.; Radoi, A.; Popescu, M.; Simion, M.; Bragaru, A.; Ignat, T. Design, Fabrication and Characterization of a Low-Impedance 3D Electrode Array System for Neuro-Electrophysiology. Sensors 2012, 12, 16571-16590.

Show more citation formats Show less citations formats

Article Access Map by Country/Region

Only visits after 24 November 2015 are recorded.
Back to TopTop