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Nirschl M, Rantala A, Tukkiniemi K, Auer S, Hellgren A-C, Pitzer D, Schreiter M, Vikholm-Lundin I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors. 2010; 10(5):4180-4193. https://doi.org/10.3390/s100504180

Nirschl, Martin, Arto Rantala, Kari Tukkiniemi, Sanna Auer, Ann-Charlotte Hellgren, Dana Pitzer, Matthias Schreiter, and Inger Vikholm-Lundin. 2010. "CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing" Sensors 10, no. 5: 4180-4193. https://doi.org/10.3390/s100504180

Nirschl, M., Rantala, A., Tukkiniemi, K., Auer, S., Hellgren, A.-C., Pitzer, D., Schreiter, M., & Vikholm-Lundin, I. (2010). CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors, 10(5), 4180-4193. https://doi.org/10.3390/s100504180