In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis
Liu, Y.-H.; Wang, C.-K.; Ting, Y.; Lin, W.-Z.; Kang, Z.-H.; Chen, C.-S.; Hwang, J.-S. In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis. Int. J. Mol. Sci. 2009, 10, 4498-4514. https://doi.org/10.3390/ijms10104498
Liu Y-H, Wang C-K, Ting Y, Lin W-Z, Kang Z-H, Chen C-S, Hwang J-S. In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis. International Journal of Molecular Sciences. 2009; 10(10):4498-4514. https://doi.org/10.3390/ijms10104498
Chicago/Turabian StyleLiu, Yi-Hung, Chi-Kai Wang, Yung Ting, Wei-Zhi Lin, Zhi-Hao Kang, Ching-Shun Chen, and Jih-Shang Hwang. 2009. "In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis" International Journal of Molecular Sciences 10, no. 10: 4498-4514. https://doi.org/10.3390/ijms10104498