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Journal: Molecules, 2025
Volume: 30
Number: 1091
Article:
Evaluation and Characterization of High-Uniformity SiNx Thin Film with Controllable Refractive Index by Home-Made Cat-CVD Based on Orthogonal Experiments
Authors:
by
Caifang Li, Minghui Li, Jinsong Shi, Haibin Huang and Zhimei Li
Link:
https://www.mdpi.com/1420-3049/30/5/1091
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