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Electrochemical Deposition and Etching of Quasi-Two-Dimensional Periodic Membrane Structure
- Binbin Yao,
- Yongsheng Xu,
- Benzhuo Lou,
- Yinbo Fan and
- Erwei Wang
In this paper, two experimental procedures are reported, namely electro-deposition in the ultrathin liquid layer and chemical micro-etching. Firstly, a large area quasi-two-dimensional periodic membrane with adjustable density is deposited on a Si su...