Search Results (4)

Gallium liquid metals (LMs) like Galinstan and eutectic Gallium-Indium (EGaIn) have seen increasing applications in heavy metal ion (HMI) sensing, because of their ability to amalgamate with HMIs like lead, their high hydrogen potential, and their stable electrochemical window. Furthermore, coating LM droplets with nanopowders of tungsten oxide (WO) has shown enhancement in HMI sensing owing to intense electrical fields at the nanopowder-liquid–metal interface. However, most LM HMI sensors are droplet based, which show limitations in scalability and the homogeneity of the surface. A scalable approach that can be extended to LM electrodes is therefore highly desirable. In this work, we present, for the first time, WO-Galinstan HMI sensors fabricated via photolithography of a negative cavity, Galinstan brushing inside the cavity, lift-off, and galvanic replacement (GR) in a tungsten salt solution. Successful GR of Galinstan was verified using optical microscopy, SEM, EDX, XPS, and surface roughness measurements of the Galinstan electrodes. The fabricated WO-Galinstan electrodes demonstrated enhanced sensitivity in comparison with electrodes structured from pure Galinstan and detected lead at concentrations down to 0.1 mmol·L⁻¹. This work paves the way for a new class of HMI sensors using GR of WO-Galinstan electrodes, with applications in microfluidics and MEMS for a toxic-free environment. Full article

This paper proposes a novel capacitive liquid metal microelectromechanical system (MEMS) inclinometer sensor and introduces its design, fabrication, and signal measurement. The sensor was constructed using three-layer substrates. A conductive liquid droplet was rolled along an annular groove of the intermediate substrate to reflect angular displacement, and capacitors were used to detect the position of the droplet. The numerical simulation work provides the working principle and structural design of the sensor, and the fabrication process of the sensor was proposed. Furthermore, the static capacitance test and the dynamic signal test were designed. The sensor had a wide measurement range from ±2.12° to ±360°, and the resolution of the sensor was 0.4°. This sensor further expands the measurement range of the previous liquid droplet MEMS inclinometer sensors. Full article

Microelectromechanical system (MEMS) liquid sensors may be used under large acceleration conditions. It is important to understand the deformation of the liquid droplets under acceleration for the design and applications of MEMS liquid sensors, as this will affect the performance of the sensors. This paper presents an investigation into the deformation of a mercury droplet in a liquid MEMS sensor under accelerations and reports the relationship between the deformation and the accelerations. The Laminar level set method was used in the numerical process. The geometric model consisted of a mercury droplet of 2 mm in diameter and an annular groove of 2.5 mm in width and 2.5 mm in height. The direction of the acceleration causing the droplet to deform is perpendicular to the direction of gravity. Fabrication and acceleration experiments were conducted. The deformation of the liquid was recorded using a high-speed camera. Both the simulation and experimental results show that the characteristic height of the droplets decreases as the acceleration increases. At an acceleration of 10 m/s², the height of the droplet is reduced from 2 to 1.658 mm, and at 600 m/s² the height is further reduced to 0.246 mm. The study finds that the droplet can deform into a flat shape but does not break even at 600 m/s². Besides, the properties of the material in the domain surrounding the droplet and the contact angle also affect the deformation of the droplet. This work demonstrates the deformation of the liquid metal droplets under acceleration and provides the basis for the design of MEMS droplet acceleration sensors. Full article

A temperature sensor that uses temperature-sensitive fluorescent dyes is developed. The droplet sensor has a diameter of 40 µm and uses 1 g/L of Rhodamine B (RhB) and 0.5 g/L of Rhodamine 110 (Rh110), which are fluorescent dyes that are dissolved in an ionic liquid (1-ethyl-3-methylimidazolium ethyl sulfate) to function as temperature indicators. This ionic liquid is encapsulated using vacuum Parylene film deposition (which is known as the Parylene-on-liquid-deposition (PoLD) method). The droplet is sealed by the chemically stable and impermeable Parylene film, which prevents the dye from interacting with the molecules in the solution and keeps the volume and concentration of the fluorescent material fixed. The two fluorescent dyes enable the temperature to be measured ratiometrically such that the droplet sensor can be used in various applications, such as the wireless temperature measurement of microregions. The sensor can measure the temperature of such microregions with an accuracy of 1.9 °C, a precision of 3.7 °C, and a fluorescence intensity change sensitivity of 1.0%/K. The sensor can measure temperatures at different sensor depths in water, ranging from 0 to 850 µm. The droplet sensor is fabricated using microelectromechanical system (MEMS) technology and is highly applicable to lab-on-a-chip devices. Full article