Search Results (39)

Three-dimensional (3D) photolithography has found wide applications in microelectronics, optoelectronics, biomedicine, etc. Traditionally, it requires repetitive exposure and developing cycles. Meanwhile, a laser direct writing (LDW) system with a digital micromirror device (DMD) enables high-speed maskless lithography with programmable doses. In this paper, we propose a quasi-3D digitized photolithography via LDW with a DMD to remove multiple developing cycles from the process. This approach quantizes the dose of the 3D geometry and stores it in a grayscale image. And the entire dose distribution can be formed by overlapping the exposures with sliced binary dose maps from the above grayscale dose map. In the image slicing algorithm, a modified Golomb coding is introduced to make full use of the highest available exposure intensity. Both 1D multi-step patterns and diffractive optical devices (DOEs) have been fabricated to verify its feasibility. This type of digitized quasi-3D photolithography can be applied to fabricating DOEs, microlens arrays (MLAs), micro-refractive optical elements (μROEs), etc., and 3D molds for micro-embossing/nano-imprinting. Full article

Direct-writing submicron copper circuits on glass with laser precision—without lithography, vacuum deposition, or etching—represents a transformative step in next-generation microfabrication. We present a high-resolution, maskless method for metallizing glass using ultrashort pulse Bessel beam laser processing, followed by silver ion activation and electroless copper plating. The laser-modified glass surface hosts nanoscale chemical defects that promote the in situ reduction of Ag⁺ to metallic Ag⁰ upon exposure to AgNO₃ solution. These silver seeds act as robust catalytic and adhesion sites for subsequent copper growth. Using this approach, we demonstrate circuit traces as narrow as 0.7 µm, featuring excellent uniformity and adhesion. Compared to conventional redistribution-layer (RDL) and under-bump-metallization (UBM) techniques, this process eliminates multiple lithographic and vacuum-based steps, significantly reducing process complexity and production time. The method is scalable and adaptable for applications in transparent electronics, fan-out packaging, and high-density interconnects. Full article

This review focuses on the innovative use of laser techniques in developing and functionalizing biomimetic surfaces, emphasizing their potential applications in the medical and biological fields. Drawing inspiration from the remarkable properties of various natural systems, such as the water-repellent lotus leaf, the adhesive gecko foot, the strong yet lightweight spider silk, and the unique optical structures of insect wings, we explore the potential for replicating these features through advanced laser surface modifications. Depending on the nature and architecture of the surface, particular techniques have been designed and developed. We present an in-depth analysis of various methodologies, including laser ablation/evaporation techniques, such as Pulsed Laser Deposition and Matrix-Assisted Pulsed Laser Evaporation, and approaches for laser surface structuring, including two-photon lithography, direct laser interference patterning, laser-induced periodic surface structures, direct laser writing, laser-induced forward transfer, and femtosecond laser ablation of metals in organic solvents. Additionally, specific applications are highlighted with the aim of synthesizing this knowledge and outlining future directions for research that further explore the intersection of laser techniques and biomimetic surfaces, paving the way for advancements in biomedical applications. Full article

In the framework of fully vertical GaN-on-Silicon device technology development, we report on the optimization of non-alloyed ohmic contacts on the N-polar n+-doped GaN face backside layer. This evaluation is made possible by using patterned TLMs (Transmission Line Model) through direct laser writing lithography after locally removing the substrate and buffer layers in order to access the n+-doped backside layer. As deposited non-alloyed metal stack on top of N-polar orientation GaN layer after buffer layers removal results in poor ohmic contact quality. To significantly reduce the related specific contact resistance, an HCl treatment is applied prior to metallization under various time and temperature conditions. A 3 min HCl treatment at 70 °C is found to be the optimum condition to achieve thermally stable high ohmic contact quality. To further understand the impact of the wet treatment, SEM (Scanning Electron Microscopy) and XPS (X-ray Photoelectron Spectroscopy) analyses were performed. XPS revealed a decrease in Ga-O concentration after applying the treatment, reflecting the higher oxidation susceptibility of the N-polar face compared to the Ga-polar face, which was used as a reference. SEM images of the treated samples show the formation of pyramids on the N-face after HCl treatment, suggesting specific wet etching planes of the GaN crystal from the N-face. The size of the pyramids is time-dependent; thus, increasing the treatment duration results in larger pyramids, which explains the degradation of ohmic contact quality after prolonged high-temperature HCl treatment. Full article

In this study, we investigate the potential of two-photon lithography (2PL) as a solution to the challenges encountered in conventional membrane fabrication techniques, aiming to fabricate tailor-made membranes with high-resolution submicron pore structures suitable for advanced applications. This approach led to the development of fabrication techniques and printed membranes that can be adapted to various lab-on-a-chip (LOC) devices. Membranes were fabricated with pore diameters as small as 0.57 µm and porosities of 4.5%, as well as with larger pores of approximately 3.73 µm in diameter and very high porosities that reached up to 60%. Direct 3D printing of membranes offers a pathway for fabricating structures tailored to specific applications in microfluidics, enabling more efficient separation processes at miniature scales. This research represents a significant step towards bridging the gap between membrane technology and microfluidics, promising enhanced capabilities for a wide array of applications in biotechnology, chemical analysis, and beyond. Full article

The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic–inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 μm scale micro-optics. Full article

We propose a method for designing a long-focal-depth diffractive achromat (LFDA). By applying rotational symmetric parameterization, an LFDA with a diameter of 10.89 mm is designed over three wavelengths at six focal planes. The smoothly changed slope designed by the binary variable slope search (BVSS) algorithm greatly reduces the discontinuity in depth, thus it is a fabrication-friendly process for grayscale laser direct writing lithography, involving less fabrication error and cost. The deviation between the designed and fabricated profiles amounts to 9.68%. The LFDA operates at multiple wavelengths (654 nm, 545 nm, and 467 nm) with a DOF of 500 mm~7.65λ × 10⁵ (λ = 654 nm). The simulated and measured full-width at half-maximum (FWHM) of the focused beam is close to the diffraction limit. Experimental studies suggest that the LFDA possesses a superior capability to form high-quality chromatic images in a wide range of depths of field. The LFDA opens a new avenue to achieve compact achromatic systems for imaging, sensing, and 3D display. Full article

An optical coupler is a key input/output (I/O) device in a photonic integrated circuit (PIC), which plays the role of light-source import and modulated light output. In this research, a vertical optical coupler consisting of a concave mirror and a half-cone edge taper was designed. We optimized the structure of mirror curvature and taper through finite-difference-time-domain (FDTD) and ZEMAX simulation to achieve mode matching between SMF (single-mode fiber) and the optical coupler. The device was fabricated via laser-direct-writing 3D lithography, dry etching and deposition on a 3.5 µm silicon-on-insulator (SOI) platform. The test results show that the overall loss of the coupler and its connected waveguide at 1550 nm was 1.11 dB in transverse-electric (TE) mode and 2.25 dB in transverse-magnetic (TM) mode. Full article

Under the background of green and low-carbon era, efficiently utilization of renewable biomass materials is one of the important choices to promote ecologically sustainable development. Accordingly, 3D printing is an advanced manufacturing technology with low energy consumption, high efficiency, and easy customization. Biomass 3D printing technology has attracted more and more attentions recently in materials area. This paper mainly reviewed six common 3D printing technologies for biomass additive manufacturing, including Fused Filament Fabrication (FFF), Direct Ink Writing (DIW), Stereo Lithography Appearance (SLA), Selective Laser Sintering (SLS), Laminated Object Manufacturing (LOM) and Liquid Deposition Molding (LDM). A systematic summary and detailed discussion were conducted on the printing principles, common materials, technical progress, post-processing and related applications of typical biomass 3D printing technologies. Expanding the availability of biomass resources, enriching the printing technology and promoting its application was proposed to be the main developing directions of biomass 3D printing in the future. It is believed that the combination of abundant biomass feedstocks and advanced 3D printing technology will provide a green, low-carbon and efficient way for the sustainable development of materials manufacturing industry. Full article

Laser Direct Writing (LDW), also known as 3D multi-photon laser lithography of resins, is a promising technique for fabricating complex free-form elements, including micro-optical functional components. Regular organic or hybrid (organic–inorganic) resins are often used, with the latter exhibiting better optical characteristics, as well as having the option to be heat-treated into inorganic glass-like structures particularly useful for resilient micro-optics. This work is a continuation of our SZ2080™ calcination development of micro-optics, specifically studying the Laser-Induced Damage Threshold (LIDT). Such sol–gel-derived glass 3D micro-structures, particularly those that undergo heat treatment, have not been well-characterized in this respect. In this pilot study, we investigated the LIDT using the Series-on-One (S-on-1) protocol of functional micro-lenses produced via LDW and subsequently calcinated. Our results demonstrate that the LIDT can be significantly increased, even multiple times, by this approach, thus enhancing the resilience and usefulness of these free-form micro-optics. This work represents the first investigation in terms of LIDT into the impact of calcination on LDW-produced, sol–gel-derived glass micro-structures and provides important insights for the development of robust micro-optical devices. Full article

To enable high-density optical storage, better storage media structures, diversified recording methods, and improved accuracy of readout schemes should be considered. In this study, we propose a novel three-dimensional (3D) sloppy nanostructure as the optical storage device, and this nanostructure can be fabricated using the 3D laser direct writing technology. It is a 900 nm high, 1 × 2 µm wide Si slope on a 200 nm SiO2 layer with 200 nm Si₃N₄ deposited on top to enhance reflectivity. In this study, we propose a reflected spectrum-based method as the readout recording strategy to stabilize information readout more stable. The corresponding reflected spectrum varied when the side wall angle of the slope and the azimuth angle of the nanostructure were tuned. In addition, an artificial neural network was applied to readout the stored information from the reflected spectrum. To simulate the realistic fabrication error and measurement error, a 20% noise level was added to the study. Our findings showed that the readout accuracy was 99.86% for all 120 data sequences when the slope and azimuth angle were varied. We investigated the possibility of a higher storage density to fully demonstrate the storage superiority of this designed structure. Our findings also showed that the readout accuracy can reach its highest level at 97.25% when the storage step of the encoded structure becomes 7.5 times smaller. The study provides the possibility to further explore different nanostructures to achieve high-density optical storage. Full article

Two-photon lithography (TPL) plays a vital role in microstructure fabrication due to its high processing accuracy and maskless characteristics. To optimize the manufacturing quality deteriorated by the defocus of the substrate, an autofocus approach based on improved differential confocal microscopy (IDCM) is proposed in this paper. Through analyzing the intensity response signals from two detectors with symmetrical axial offset, the defocus amount is measured and compensated for with high precision and noise immunity to stabilize the substrate. The verification experiments on the coverslip reported a detection sensitivity of 5 nm, a repetitive measurement accuracy of less than 15 nm, and a focusing accuracy reaching around 5 nm. The consistency between simulation and characterization demonstrated the effectiveness and superior performance of the autofocus system for the high production quality of the metalens array. The proposed autofocus method shows promise for further application to the fabrication of complex structures on various substrates. Full article

To use Ag nanowires for various industries, it is crucial to develop an appropriate patterning method. There are various types of patterning methods, but there has been no comprehensive review discussing and summarizing them. This review paper provides an overview of the various patterning techniques of Ag nanowire electrodes, including photolithography, nanoimprint lithography, inkjet printing, electrohydrodynamic jet printing, and other emerging methods. These transparent electrodes have received significant attention due to their high transparency, low sheet resistance, and flexibility, making them ideal for applications such as flexible electronics, touch screens, and solar cells. Each patterning technique has its benefits and limitations, and its suitability depends on specific application requirements. Photolithography is a well-established technique that can achieve high-resolution patterns, while nanoimprint lithography is a low-cost and versatile method for large-area patterning. Inkjet printing and E-jet printing provide the advantages of high throughput, precise control, and the ability to print on different substrates. Stencil printing, laser direct writing, and electrospinning are emerging techniques that showing high potential for patterning Ag nanowire electrodes. The choice of patterning technique ultimately depends on various factors, such as resolution requirements, cost, substrate compatibility, and throughput. Full article

Micron- and submicron-scale 3D structure realization nowadays is possible due to the two-photon photopolymerization (TPP) direct laser writing photolithography (DLW photolithography) method. However, the achievement of lithographic features with dimensions less than 100 nm is in demand for the fabrication of micro-optical elements with high curvature values, including X-ray microlenses. Spectroscopic and photochemical study of a photoinitiator (PI) based on a methyl methacrylate derivative of 2,5-bis(4-(dimethylamino)benzylidene) cyclopentanone was performed. Enhanced intersystem crossing in the methyl methacrylate derivative results in increased radical generation for the subsequent initiation of polymerization. A comprehensive study of the new photocompositions was performed, with particular emphasis on photochemical constants, the degree of photopolymerization, and topology. The optimal parameters for the fabrication of mechanically stable structures were determined in this research. The threshold dose parameters for lithography (radiation power of 5 mW at a speed of 180 µm/s) when trying to reach saturation values with a conversion degree of (35 ± 1) % were defined, as well as parameters for sub-100 nm feature fabrication. Moreover, the 45 nm feature size for elements was reached. Fabrication of X-ray lens microstructures was also demonstrated. Full article

Three-dimensional direct laser writing technology enables one to print polymer microstructures whose size varies from a few hundred nanometers to a few millimeters. It has been shown that, by tuning the laser power during writing, one can adjust continuously the optical and elastic properties with the same base material. This process is referred to as gray-tone lithography. In this paper, we characterize by Brillouin light scattering the complex elastic constant $C_{11}$ of different reticulated isotropic polymers, at longitudinal phonon frequencies of the order of 16 GHz. We estimate the real part of the $C_{11}$ constant to vary from 7 to 11 GPa as a function of laser power, whereas its imaginary part varies between 0.25 and 0.6 GPa. The linear elastic properties are further measured at a fixed laser power as a function of temperature, from $20{}^{\circ }$C to $80{}^{\circ }$C. Overall, we show that our 3D printed samples have a good elastic quality with high Q factors only ten times smaller than fused silica at hypersonic frequencies. Full article