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Keywords = gated silicon drift detector

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11 pages, 18265 KiB  
Article
High-Performance Bidirectional Chemical Sensor Platform Using Double-Gate Ion-Sensitive Field-Effect Transistor with Microwave-Assisted Ni-Silicide Schottky-Barrier Source/Drain
by Yeong-Ung Kim and Won-Ju Cho
Chemosensors 2022, 10(4), 122; https://doi.org/10.3390/chemosensors10040122 - 24 Mar 2022
Cited by 5 | Viewed by 3381
Abstract
This study proposes a bidirectional chemical sensor platform using ambipolar double-gate ion-sensitive field-effect transistors (ISFET) with microwave-assisted Ni-silicide Schottky-barrier (SB) source and drain (S/D) on a fully depleted silicon-on-insulator (FDSOI) substrate. The microwave-assisted Ni-silicide SB S/D offer bidirectional turn-on characteristics for both p- [...] Read more.
This study proposes a bidirectional chemical sensor platform using ambipolar double-gate ion-sensitive field-effect transistors (ISFET) with microwave-assisted Ni-silicide Schottky-barrier (SB) source and drain (S/D) on a fully depleted silicon-on-insulator (FDSOI) substrate. The microwave-assisted Ni-silicide SB S/D offer bidirectional turn-on characteristics for both p- and n-type channel operations. The p- and n-type operations are characterized by high noise resistance as well as improved mobility and excellent drift performance, respectively. These features enable sensing regardless of the gate voltage polarity, thus contributing to the use of detection channels based on various target substances, such as cells, antigen-antibodies, DNA, and RNA. Additionally, the capacitive coupling effect existing between the top and bottom gates help achieve self-amplified pH sensitivity exceeding the Nernst limit of 59.14 mV/pH without any additional amplification circuitry. The ambipolar FET sensor performance was evaluated for bidirectional electrical characteristics, pH detection in the single-gate and double-gate modes, and reliability in continuous and repetitive operations. Considering the excellent characteristics confirmed through evaluation, the proposed ambipolar chemical sensor platform is expected to be applicable to various fields including biosensors. And through linkage with subsequent studies, various medical applications and precision detector operations for specific markers will be possible. Full article
(This article belongs to the Collection pH Sensors, Biosensors and Systems)
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17 pages, 7123 KiB  
Article
A Low-Noise X-ray Astronomical Silicon-On-Insulator Pixel Detector Using a Pinned Depleted Diode Structure
by Hiroki Kamehama, Shoji Kawahito, Sumeet Shrestha, Syunta Nakanishi, Keita Yasutomi, Ayaki Takeda, Takeshi Go Tsuru and Yasuo Arai
Sensors 2018, 18(1), 27; https://doi.org/10.3390/s18010027 - 23 Dec 2017
Cited by 24 | Viewed by 6335
Abstract
This paper presents a novel full-depletion Si X-ray detector based on silicon-on-insulator pixel (SOIPIX) technology using a pinned depleted diode structure, named the SOIPIX-PDD. The SOIPIX-PDD greatly reduces stray capacitance at the charge sensing node, the dark current of the detector, and capacitive [...] Read more.
This paper presents a novel full-depletion Si X-ray detector based on silicon-on-insulator pixel (SOIPIX) technology using a pinned depleted diode structure, named the SOIPIX-PDD. The SOIPIX-PDD greatly reduces stray capacitance at the charge sensing node, the dark current of the detector, and capacitive coupling between the sensing node and SOI circuits. These features of the SOIPIX-PDD lead to low read noise, resulting high X-ray energy resolution and stable operation of the pixel. The back-gate surface pinning structure using neutralized p-well at the back-gate surface and depleted n-well underneath the p-well for all the pixel area other than the charge sensing node is also essential for preventing hole injection from the p-well by making the potential barrier to hole, reducing dark current from the Si-SiO2 interface and creating lateral drift field to gather signal electrons in the pixel area into the small charge sensing node. A prototype chip using 0.2 μm SOI technology shows very low readout noise of 11.0 erms, low dark current density of 56 pA/cm2 at −35 °C and the energy resolution of 200 eV(FWHM) at 5.9 keV and 280 eV (FWHM) at 13.95 keV. Full article
(This article belongs to the Section Physical Sensors)
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12 pages, 1898 KiB  
Article
Gated Silicon Drift Detector Fabricated from a Low-Cost Silicon Wafer
by Hideharu Matsuura, Shungo Sakurai, Yuya Oda, Shinya Fukushima, Shohei Ishikawa, Akinobu Takeshita and Atsuki Hidaka
Sensors 2015, 15(5), 12022-12033; https://doi.org/10.3390/s150512022 - 22 May 2015
Cited by 4 | Viewed by 7561
Abstract
Inexpensive high-resolution silicon (Si) X-ray detectors are required for on-site surveys of traces of hazardous elements in food and soil by measuring the energies and counts of X-ray fluorescence photons radially emitted from these elements. Gated silicon drift detectors (GSDDs) are much cheaper [...] Read more.
Inexpensive high-resolution silicon (Si) X-ray detectors are required for on-site surveys of traces of hazardous elements in food and soil by measuring the energies and counts of X-ray fluorescence photons radially emitted from these elements. Gated silicon drift detectors (GSDDs) are much cheaper to fabricate than commercial silicon drift detectors (SDDs). However, previous GSDDs were fabricated from \(10\)-k\(\Omega \cdot\)cm Si wafers, which are more expensive than \(2\)-k\(\Omega \cdot\)cm Si wafers used in commercial SDDs. To fabricate cheaper portable X-ray fluorescence instruments, we investigate GSDDs formed from \(2\)-k\(\Omega \cdot\)cm Si wafers. The thicknesses of commercial SDDs are up to \(0.5\) mm, which can detect photons with energies up to \(27\) keV, whereas we describe GSDDs that can detect photons with energies of up to \(35\) keV. We simulate the electric potential distributions in GSDDs with Si thicknesses of \(0.5\) and \(1\) mm at a single high reverse bias. GSDDs with one gate pattern using any resistivity Si wafer can work well for changing the reverse bias that is inversely proportional to the resistivity of the Si wafer. Full article
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Japan 2015)
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