Search Results (4)

A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or piezoelectric actuator has been designed to replace current commercial PCMs, which require external actuators to perform contact-resonance imaging (CRI) of workpieces and avoid unwanted “forest of peaks” observed at large travel speed in the millimeter-per-second range. Initially, a PCM with integrated resistors for electrothermal actuation (ETA) was designed, built, and tested. Here, the ETA can be performed with a piezoresistive Wheatstone bridge, which converts mechanical strain into electrical signals by boron diffusion in order to simplify the production process. Moreover, a new substrate contact has been added in the new design for an AC voltage supply for the Wheatstone bridge to reduce parasitic signal influence via the EAM (Electromechanical Amplitude Modulation) in our homemade CRI system. Measurements on a bulk Al sample show the expected force dependence of the CR frequency. Meanwhile, fitting of the measured contact-resonance spectra was applied based on a Fano-type line shape to reveal the material-specific signature of a single harmonic resonator. However, noise is greatly increased with the bending mode and contact force increasing on viscoelastic samples. Then, to avoid unspecific peaks remaining in the spectra of soft samples, cantilevers with integrated piezoelectric actuators (PEAs) were designed. The numbers and positions of the actuators were optimized for specific CR vibration modes using analytical modeling of the cantilever bending based on the transfer-matrix method and Hertzian contact mechanics. To confirm the design of the PCM with a PEA, finite element analysis (FEA) of CR probing of a sample with a Young’s modulus of 10 GPa was performed. Close agreement was achieved by Fano-type line shape fitting of amplitude and phase of the first four vertical bending modes of the cantilever. As an important structure of the PCM with a PEA, the piezoresistive Wheatstone bridge had to have suitable doping parameters adapted to the boundary conditions of the manufacturing process of the newly designed PCM. Full article

In recent years, the immense potential for MEMS devices in the biomedical industry has been understood. It has been determined that, among their many plausible functions, their use may also extend to single human red blood cell diagnostics, whereby biomarkers of quantifiable magnitudes may be detected. Without a doubt, the mechanical and thermal specifications by which potential devices must be able to function are very strict. Among them is the ability to operate while fully submerged in aqueous solutions. In this work, six devices were modelled numerically in deionised (DI) water and 0.9 wt% NaCl solution, the results of which were validated experimentally. The mechanical performance of the different devices when fully submerged in 0.9 wt% NaCl solution is hereby discussed. With the exception of one, all the devices in their current configuration are confirmed to be suitable candidates for biomedical applications. Full article

Recent developments in MEMS technologies have made such devices attractive for use in applications that involve precision engineering and scalability. In the biomedical industry, MEMS devices have gained popularity in recent years for use as single-cell manipulation and characterisation tools. A niche application is the mechanical characterisation of single human red blood cells, which may exhibit certain pathological conditions that impart biomarkers of quantifiable magnitude that are potentially detectable via MEMS devices. Such applications come with stringent thermal and structural specifications wherein the potential device candidates must be able to function with no exceptions. This work presents a state-of-the-art numerical modelling methodology that is capable of accurately predicting MEMS device performance in various media, including aqueous ones. The method is strongly coupled in nature, whereby thermal as well as structural degrees of freedom are transferred to and from finite element and finite volume solvers at every iteration. This method therefore provides MEMS design engineers with a reliable tool that can be used in design and development stages and helps to avoid total reliability on experimental testing. The proposed numerical model is validated via a series of physical experiments. Four MEMS electrothermal actuators with cascaded V-shaped drivers are presented. With the use of the newly proposed numerical model as well as the experimental testing, the MEMS devices’ suitability for biomedical applications is confirmed. Full article

Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid–structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal–electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature. Full article