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Keywords = electromagnetic force compensation (EMFC)

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15 pages, 5288 KB  
Article
Stiffness Considerations for a MEMS-Based Weighing Cell
by Karin Wedrich, Valeriya Cherkasova, Vivien Platl, Thomas Fröhlich and Steffen Strehle
Sensors 2023, 23(6), 3342; https://doi.org/10.3390/s23063342 - 22 Mar 2023
Cited by 8 | Viewed by 2905
Abstract
In this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucial system parameters, the stiffness, is analyzed. The system [...] Read more.
In this paper, a miniaturized weighing cell that is based on a micro-electro-mechanical-system (MEMS) is discussed. The MEMS-based weighing cell is inspired by macroscopic electromagnetic force compensation (EMFC) weighing cells and one of the crucial system parameters, the stiffness, is analyzed. The system stiffness in the direction of motion is first analytically evaluated using a rigid body approach and then also numerically modeled using the finite element method for comparison purposes. First prototypes of MEMS-based weighing cells were successfully microfabricated and the occurring fabrication-based system characteristics were considered in the overall system evaluation. The stiffness of the MEMS-based weighing cells was experimentally determined by using a static approach based on force-displacement measurements. Considering the geometry parameters of the microfabricated weighing cells, the measured stiffness values fit to the calculated stiffness values with a deviation from −6.7 to 3.8% depending on the microsystem under test. Based on our results, we demonstrate that MEMS-based weighing cells can be successfully fabricated with the proposed process and in principle be used for high-precision force measurements in the future. Nevertheless, improved system designs and read-out strategies are still required. Full article
(This article belongs to the Topic MEMS Sensors and Resonators)
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23 pages, 7052 KB  
Article
Effect of Electromagnetic Damping on System Performance of Voice-Coil Actuator Applied to Balancing-Type Scale
by Abdullah, Jung-Hwan Ahn and Hwa-Young Kim
Actuators 2020, 9(1), 8; https://doi.org/10.3390/act9010008 - 1 Feb 2020
Cited by 7 | Viewed by 11296
Abstract
Changing a time-varying magnetic field induces an electromotive force (EMF) in non-magnetic conductive materials, resulting in an eddy current across the conductor. Thus, electromagnetic damping can be used as viscous damping. This study theoretically and experimentally investigates the electromagnetic damping characteristics of a [...] Read more.
Changing a time-varying magnetic field induces an electromotive force (EMF) in non-magnetic conductive materials, resulting in an eddy current across the conductor. Thus, electromagnetic damping can be used as viscous damping. This study theoretically and experimentally investigates the electromagnetic damping characteristics of a bobbin-wounded coil with an attached cantilever beam floating over a permanent magnet; the beam is balanced by electromagnetic force compensation (EMFC) instead of applied weight. System identification is carried out for the mass (m), damping coefficient (c), and spring constant (k) values. The presence of a back EMF seen in either conductive or non-conductive material responses in the experiments includes the step input and corresponding output responses to measure the electromagnetic damping force with and without a voice-coil actuator (VCA). The results were validated using bobbins of conductive (aluminum) and non-conductive (plastic) materials. The experimental results for the conductive material show that the electromagnetic damping force is 10 times greater than that of the non-conductive material; the opposite was true in the case without a VCA, where the force was almost zero for the non-conductive material. In conclusion, conductivity is directly related to the electromagnetic damping force, which affects the performance of a VCA. Full article
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