Search Results (5)

This study investigates the impact of four parameters—gate angles, fin height controlled through gate overlaps and the distance from fin to source/drain, and substrate bottom doping concentration—on the row hammer effect (RHE) in DRAM cells. The influence of adjacent and passing gates on the DRAM cell body potential was identified as a key factor in D0 and D1 failures. The tolerance for D1 and D0 failures was analyzed, defined as the threshold number of pulses required to induce a 0.6 V change in the storage node voltage (from 1.2 V to 0.6 V for a D1 failure or from 0 V to 0.6 V for a D0 failure). D1 (D0) failure tolerances with the slope from the top of the top gate (θ_angle) of 3°, the height of the TiN gate covering the fin (H_{fin_overlap}) of 12.5 nm, and the height of the fin (H_fin) of 12.5 nm are 1.26 × 10⁶ (4.8 × 10⁶), 1.14 × 10⁶ (4 × 10⁷), and 7.5 × 10⁵ (4.8 × 10⁵), respectively. Higher θ_angles and smaller fin heights generally result in higher RHE tolerances. Although decreasing the fin height reduced the RHE, it also decreased the on-current and resulted in an increase in the threshold voltage (V_T) and the subthreshold swing (SS). In addition, by increasing the substrate bottom doping concentration (P_{dop_bot}), we improve RHE tolerance twice its original level without reducing the on-current. Therefore, designing a buried channel array transistor (BCAT) structure requires careful consideration of these trade-offs, and a thorough understanding of the underlying mechanism is crucial to devising strategies that reduce RHE tolerance. The findings of this study are expected to contribute significantly to the development of next-generation DRAM architectures, enhancing stability and performance. By addressing the reliability challenges posed by advanced scaling, this study paves the way for the ongoing advancement of DRAM technology for high-density and high-performance applications. Full article

As semiconductor devices become smaller, their performance and integration density improve, but new negative effects emerge due to the reduced distance between structures. In DRAM, these effects can lead to data loss or require additional refresh cycles, causing performance degradation. Specifically, in the 6F² DRAM structure, activating a word line (WL) lowers the energy barrier of adjacent WLs, leading to the Pass Gate Effect (PGE). This study investigates the use of buried oxide beneath the WL to mitigate the PGE through simulation. Using SILVACO TCAD, we analyzed the impact of varying the size and position of the buried oxide on the PGE. The results showed that increasing the oxide size or reducing the distance to the WL effectively reduced the PGE. However, the presence of interface traps, which increase with the addition of buried oxide, was found to exacerbate the PGE, indicating that minimizing interface traps is crucial when incorporating buried oxide. Full article

The Pass Gate Effect (PGE), often referred to as adjacent cell interference, presents a significant challenge in dynamic random-access memory (DRAM). In this study, we investigate the impact of PGE and propose innovative solutions to address this issue in DRAM technology, employing 10 nm node technology with buried channel array transistors. To evaluate the efficacy of our proposals, we utilized SILVACO for simulating various DRAM configurations. Our approach centers on two key structural optimizations: the introduction of a spherical Shallow Trench Isolation (STI) and the incorporation of a silicon nitride (Si₃N₄) layer within the spherical STI structure. These optimizations were meticulously designed to mitigate the PGE by considering several factors that are highly influential in its manifestation. To validate our approach, we conducted comprehensive simulations, comparing the PGE factors of typical DRAM structures with those of our proposed configurations. The results of our analysis strongly support the effectiveness of our proposed structural enhancements in alleviating the PGE when contrasted with conventional DRAM structures. Remarkably, our optimizations achieved a remarkable 82.4% reduction in the PGE, marking a significant breakthrough in the field of DRAM technology. By addressing the PGE challenge and substantially reducing its impact, our research contributes to the advancement of DRAM technology, offering practical solutions to enhance data integrity and reliability in the era of 10 nm node DRAM. Full article

As the physical dimensions of cell transistors in dynamic random-access memory (DRAM) have been aggressively scaled down, buried-channel-array transistors (BCATs) have been adopted in industry to suppress short channel effects and to achieve a better performance. In very aggressively scaled-down BCATs, the impact of structural variations on the electrical characteristics can be more significant than expected. Using a technology computer-aided design (TCAD) tool, the structural variations in BCAT (e.g., the aspect ratio of the BCAT recess-to-gate length, BCAT depth, junction depth, fin width, and fin fillet radius) were simulated to enable a quantitative understanding of its impact on the device characteristics, such as the input/output characteristics, threshold voltage, subthreshold swing, on-/off-current ratio, and drain-induced barrier lowering. This work paves the road for the design of a variation-robust BCAT. Full article

In this paper, we propose a new buried channel array transistor structure to solve the problem of current leakage occurring in the capacitors of dynamic random-access memory (DRAM) cells. This structure has a superior off current performance compared with three previous types of structures. In particular, the proposed buried channel array transistor has a 43% lower off current than the conventional asymmetric doping structure. Here, we show the range of the effective buried insulator parameter according to the depth of the buried gate, and we effectively show the range of improvement for the off current. Full article