Search Results (3)

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO₃ thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (f_s) and effective electromechanical coupling coefficient ($K_{eff}^2$). This paper presents an in-depth study of simulations and measurements of laterally excited bulk acoustic wave resonators based on an X-cut LiNbO₃/SiO₂/Si substrate and a LiNbO₃ thin film to analyze the effects of electrode angle rotation ($\theta$) on the modes, f_s, and $K_{eff}^2$. The rotated $\theta$ leads to different electric field directions, causing mode changes, where the resonators without cavities are longitudinal leaky SAWs (LLSAWs, $\theta$ = 0$°$) and zero-order shear horizontal SAWs (SH₀-SAWs, $\theta$ = 90$°$) and the resonators with cavities are zero-order-symmetry (S₀) lateral vibrating resonators (LVRs, $\theta$ = 0$°$) and SH₀ plate wave resonators (PAW, $\theta$ = 90$°$). The resonators are fabricated based on a 400 nm X-cut LiNbO₃ thin-film substrate, and the measured results are consistent with those from the simulation. The fabricated LLSAW and SH₀-SAW without cavities show a $K_{eff}^2$ of 1.62% and 26.6% and a Bode-Q_max of 1309 and 228, respectively. Meanwhile, an S₀ LVR and an SH₀-PAW with cavities present a $K_{eff}^2$ of 4.82% and 27.66% and a Bode-Q_max of 3289 and 289, respectively. In addition, the TCF with a different rotated $\theta$ is also measured and analyzed. This paper systematically analyzes resonators on X-cut LiNbO₃ thin-film substrates and provides potential strategies for multi-band and multi-bandwidth filters. Full article

In this paper, we present a comprehensive study on the propagation and dispersion characteristics of A₁ mode propagating in Z-cut LiNbO₃ membrane. The A₁ mode resonators with pentagon spiral electrodes utilizing Z-cut lithium niobate (LiNbO₃) thin film are designed and fabricated. The proposed structure excites the A₁ mode waves in both x- and y-direction by utilizing both the piezoelectric constants e₂₄ and e₁₅ due to applying voltage along both the x- and y-direction by arranging pentagon spiral electrode. The fabricated resonator operates at 5.43 GHz with no spurious mode and effective electromechanical coupling coefficient ($K_{eff}^2$) of 21.3%, when the width of electrode is 1 µm and the pitch is 5 µm. Moreover, we present a comprehensive study of the effect of different structure parameters on resonance frequency and $K_{eff}^2$ of XBAR. The $K_{eff}^2$ keeps a constant with varied thickness of LiNbO₃ thin film and different electrode rotation angles, while it declines with the increase of p from 5 to 20 µm. The proposed XBAR with pentagon spiral electrodes realize high frequency response with no spurious mode and tunable $K_{eff}^2$, which shows promising prospects to satisfy the needs of various 5 G high-band application. Full article

Evanescent acoustic waves are characterized by purely imaginary or complex wavenumbers. Earlier, in 2019 by using a three dimensional (3D) finite element method (FEM) the possibility of the excitation and registration of such waves in the piezoelectric plates was theoretically shown. In this paper the set of the acoustically isolated interdigital transducers (IDTs) with the different spatial periods for excitation and registration of the evanescent acoustic wave in Y-cut X-propagation direction of lithium niobate (LiNbO₃) plate was specifically calculated and produced. As a result, the possibility to excite and register the evanescent acoustic wave in the piezoelectric plates was experimentally proved for the first time. The evanescent nature of the registered wave has been established. The theoretical results turned out to be in a good agreement with the experimental ones. The influence of an infinitely thin layer with arbitrary conductivity placed on a plate surface was also investigated. It has been shown that the frequency region of an evanescent acoustic wave existence is very sensitive to the changes of the electrical boundary conditions. The results obtained may be used for the development of the method of the analysis of thin films electric properties based on the study of evanescent waves. Full article