Search Results (4)

Surface acoustic wave (SAW) strain sensors fabricated on piezoelectric substrates have attracted considerable attention due to their attractive features such as passive wireless sensing ability, simple signal processing, high sensitivity, compact size and robustness. To meet the needs of various functioning situations, it is desirable to identify the factors that affect the performance of the SAW devices. In this work, we perform a simulation study on Rayleigh surface acoustic wave (RSAW) based on a stacked Al/LiNbO₃ system. A SAW strain sensor with a dual-port resonator was modeled using multiphysics finite element model (FEM) method. While FEM has been widely used for numerical calculations of SAW devices, most of the simulation works mainly focus on SAW modes, SAW propagation characteristics and electromechanical coupling coefficients. Herein, we propose a systematic scheme via analyzing the structural parameters of SAW resonators. Evolution of RSAW eigenfrequency, insertion loss (IL), quality factor (Q) and strain transfer rate with different structural parameters are elaborated by FEM simulations. Compared with the reported experimental results, the relative errors of RSAW eigenfrequency and IL are about 3% and 16.3%, respectively, and the absolute errors are 5.8 MHz and 1.63 dB (the corresponding V_out/V_in is only 6.6%). After structural optimization, the obtained resonator Q increases by 15%, IL decreases by 34.6% and the strain transfer rate increases by 2.4%. This work provides a systematic and reliable solution for the structural optimization of dual-port SAW resonators. Full article

Rayleigh surface acoustic wave (RSAW)-based resonant sensors, functionalized with single and multiple monomolecular layers of Langmuir–Blodgett (LB) films, were thickness and density optimized for the detection of volatile organic compounds (VOC), which could impose a serious threat on the environment and human health. Single layers of a phospholipid (SLP), hexane dissolved arachidic acid (HDAA), and chloroform dissolved arachidic acid (CDAA) were used for the LB film preparation. Several layers of these compounds were deposited on top of each other onto the active surface of high-Q 434 MHz two-port RSAW resonators in a LB trough to prepare a highly sensitive vapor detection quartz surface microbalance (QSM). Frequency shift was measured with a vector network analyzer (VNA). These devices were probed with saturated vapors of hexane, chloroform, methanol, acetone, ethanol, and water after each deposited layer to test the behavior of the QSM’s insertion loss, loaded Q, vapor sensitivity, and to find the optimum trade-off between these parameters for the best real-life sensor performance. With 2200 ppm and 3700 ppm sensitivity to chloroform, HDAA and CDAA coated QSM devices reached the optimum sensor performance at 15 and 11–15 monolayers, respectively. Surface pressure optimized single monolayers of phospholipid LB films were found to provide up to 530 ppm sensitivity to chloroform vapors with a negligible reduction in loss and loaded Q. This vapor sensitivity is higher than the mass of the sensing layer itself, making SLP films an excellent choice for QSM functionalization. Full article

The effect of the sensitive area of the two-port resonator configuration on the mass sensitivity of a Rayleigh surface acoustic wave (R-SAW) sensor was investigated theoretically, and verified in experiments. A theoretical model utilizing a 3-dimensional finite element method (FEM) approach was established to extract the coupling-of-modes (COM) parameters in the absence and presence of mass loading covering the electrode structures. The COM model was used to simulate the frequency response of an R-SAW resonator by a P-matrix cascading technique. Cascading the P-matrixes of unloaded areas with mass loaded areas, the sensitivity for different sensitive areas was obtained by analyzing the frequency shift. The performance of the sensitivity analysis was confirmed by the measured responses from the silicon dioxide (SiO₂) deposited on different sensitive areas of R-SAW resonators. It is shown that the mass sensitivity varies strongly for different sensitive areas, and the optimal sensitive area lies towards the center of the device. Full article

Temperature induced frequency shifts may compromise the sensor response of polymer coated acoustic wave gas-phase sensors operating in environments of variable temperature. To correct the sensor data with the temperature response of the sensor the latter must be known. This study presents and discusses temperature frequency characteristics (TFCs) of solid hexamethyldisiloxane (HMDSO) polymer coated sensor resonators using the Rayleigh surface acoustic wave (RSAW) mode on ST-cut quartz. Using a RF-plasma polymerization process, RSAW sensor resonators optimized for maximum gas sensitivity have been coated with chemosensitive HMDSO films at 4 different thicknesses: 50, 100, 150 and 250 nm. Their TFCs have been measured over a (−100 to +110) °C temperature range and compared to the TFC of an uncoated device. An exponential 2,500 ppm downshift of the resonant frequency and a 40 K downshift of the sensor’s turn-over temperature (TOT) are observed when the HMDSO thickness increases from 0 to 250 nm. A partial temperature compensation effect caused by the film is also observed. A third order polynomial fit provides excellent agreement with the experimental TFC curve. The frequency downshift due to mass loading by the film, the TOT and the temperature coefficients are unambiguously related to each other. Full article